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DIN 50450-1-1987 半导体工艺材料的检验.载运气体和添加剂气体中杂质的测定.用五氧化二磷电池测定氢、氧、氮、氩和氦中的水杂质

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【英文标准名称】:Testingofmaterialsforsemiconductortechnology;determinationofimpuritiesincarriergasesanddopinggases;determinationofwaterimpurityinhydrogen,oxygen,nitrogen,argonandheliumbyusingadiphosphoruspentoxidecell
【原文标准名称】:半导体工艺材料的检验.载运气体和添加剂气体中杂质的测定.用五氧化二磷电池测定氢、氧、氮、氩和氦中的水杂质
【标准号】:DIN50450-1-1987
【标准状态】:现行
【国别】:德国
【发布日期】:1987-08
【实施或试行日期】:
【发布单位】:德国标准化学会(DIN)
【起草单位】:
【标准类型】:()
【标准水平】:()
【中文主题词】:氦;化学分析和试验;半导体工程;氩;材料;试验;半导体工艺;含量测定;体积;水分测定;氧;水;掺杂剂;杂质;分析;半导体;气体;氮;氢;容积测量
【英文主题词】:
【摘要】:Thestandarddeterminesatestmethodforthedeterminationofwaterimpurityincarriergasesanddopinggases(H2,O,N,Ar,He)usedinthesemiconductortechnology.
【中国标准分类号】:G86
【国际标准分类号】:71_100_20
【页数】:2P;A4
【正文语种】:德语


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